Lithographic apparatus, excimer laser and device manufacturing method

ABSTRACT

A CD-pitch dependency for a lithographic pattern printing process is related to the spectral intensity distribution of radiation used for projecting the pattern. A CD-pitch dependency can vary from one system to another. This can result in an iso-dense bias mismatch between systems. The invention addresses this problem by providing a lithographic apparatus including an illumination system for providing a projection beam of radiation, a projection system for projecting a patterned beam onto a target portion of a substrate, and a substrate table for holding the substrate, with a controller to provide an adjustment of the spectral distribution of radiant intensity of the projection beam. The adjustment of the spectral intensity distribution is based on data relating to an iso dense bias, and comprises a broadening of the spectral bandwidth or a change of shape of the spectral intensity distribution.

RELATED APPLICATIONS

This is a continuation in part of U.S. patent application Ser. No.11/036,190, filed Jan. 18, 2005 now abandoned, which is a continuationof U.S. patent application Ser. No. 11/019,535, filed Dec. 23, 2004 nowabandoned, each hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a lithographic apparatus, an excimerlaser and a device manufacturing method. This invention also relates toa device manufactured thereby.

2. Description of the Related Art

A lithographic apparatus is a machine that applies a desired patternonto a target portion of a substrate. Lithographic apparatus can beused, for example, in the manufacture of integrated circuits (ICs). Inthat circumstance, a patterning device, which is alternatively referredto as a mask or a reticle, may be used to generate a circuit patterncorresponding to an individual layer of the IC, and this pattern can beimaged onto a target portion (e.g., comprising one or several dies) on asubstrate (e.g., a silicon wafer) that has a layer ofradiation-sensitive material (resist). In general, a single substratewill contain a network of adjacent target portions that are successivelyexposed. Known lithographic apparatus include so-called steppers, inwhich each target portion is irradiated by exposing an entire patternonto the target portion at once, and so-called scanners, in which eachtarget portion is irradiated by scanning the pattern through theprojection beam in a given direction (the “scanning”-direction) whilesynchronously scanning the substrate parallel or anti-parallel to thisdirection.

Between the reticle and the substrate is disposed a projection systemfor imaging the irradiated portion of the reticle onto the targetportion of the substrate. The projection system includes components fordirecting, shaping or controlling the projection beam of radiation. Theprojection system may, for example, be a refractive optical system, or areflective optical system, or a catadioptric optical system,respectively including refractive optical elements, reflective opticalelements, and both refractive and reflective optical elements.

Generally, the projection system comprises a device to set the numericalaperture (commonly referred to as the “NA”) of the projection system.For example, an adjustable NA-diaphragm is provided in a pupil of theprojection system.

An illumination system may also encompass various types of opticalcomponents, including refractive, reflective, and catadioptric opticalcomponents for directing, shaping, or controlling the projection beam ofradiation, and such components may also be referred to below,collectively or singularly, as a “lens”. The illumination system of theapparatus typically comprises adjustable optical elements for setting anouter and/or inner radial extent (commonly referred to as σ-outer andσ-inner, respectively) of an intensity distribution upstream of themask, in a pupil of the illumination system. A specific setting ofσ-outer and σ-inner may be referred to hereinafter as an annularillumination mode. Controlling the spatial intensity distribution at apupil plane of the illumination system can be done to improve theprocessing parameters when an image of the illuminated object isprojected onto a substrate.

Microchip fabrication involves the control of tolerances of a space or awidth between devices and interconnecting lines, or between features,and/or between elements of a feature such as, for example, two edges ofa feature. In particular the control of space tolerance of the smallestof such spaces permitted in the fabrication of the device or IC layer isof importance. Said smallest space and/or smallest width is referred toas the critical dimension (“CD”).

With conventional projection lithographic techniques it is well knownthat an occurrence of a variance in CD for isolated features and densefeatures may limit the process latitude (i.e., the available depth offocus in combination with the allowed amount of residual error in thedose of exposure of irradiated target portions for a given tolerance onCD). This problem arises because features on the mask having the samenominal critical dimensions will print differently depending on theirpitch on the mask (i.e., the separation between adjacent features) dueto pitch dependent diffraction effects. Pitch is the sum of the featurewidth and the space between two subsequent features.

A difference in printed CD between two similar features such as linesarranged at two respective, different pitches, is referred to as aniso-dense bias or “IDB”. For example, a feature consisting of a linehaving a particular line width and arranged at a large pitch, will printdifferently from the same feature having the same line width andprovided in a dense arrangement on the mask, i.e., arranged at a smallpitch. Hence, when both dense and isolated features of criticaldimension are to be printed simultaneously, a pitch dependent variationof printed CD is observed. Data describing a specific CD-pitchdependency are generally represented by a plot of CD versus pitch,referred to as a CD-pitch curve hereinafter. The phenomenon “iso-densebias” is a particular problem in photolithographic techniques. Iso-densebias is typically measured in nanometers and represents an importantmetric for practical characterization of lithography processes.

Generally, a mask pattern is designed in such a way that differences indimensions of printed isolated and dense features are minimized to somedegree, by applying a size bias to certain features. Applying, to themask pattern, a size bias to certain features such as lines is referredto as feature-biasing and, in the case of lines, as line-biasing. Theactual pitch dependency of printed CD depends, however, on the specificproperties of the apparatus (such as aberrations and calibrations of thelithographic apparatus in use). Therefore, even in the presence offeature bias, a residual iso-dense bias may be present. Conventionallithographic apparatus do not directly address the problem of iso-densebias. Conventionally, it is the responsibility of the users ofconventional lithographic apparatus to attempt to compensate for theiso-dense bias by either changing the apparatus optical parameters, suchas the NA of the projection lens or the σ-outer and σ-inner settings, orby designing the mask in such a way that differences in dimensions ofprinted isolated and dense features are minimized. However, such changesof machine settings may adversely affect the process latitude.

Generally, in a high volume manufacturing site different lithographicprojection apparatus are to be used for the same lithographicmanufacturing process step to ensure optimal exploitation of themachines, and consequently (in view of, for example, machine-to-machinedifferences) a variance and/or errors in CD may occur in themanufacturing process. Generally, the actual pitch dependency of sucherrors and the actual CD-pitch dependency depends on the specific layoutof the pattern and the features, the aberration of the projection systemof the lithographic apparatus in use, the properties of the radiationsensitive layer on the substrate, and the radiation beam properties suchas illumination settings, and the exposure dose of radiation energy.Therefore, given a pattern to be provided by a patterning device, and tobe printed using a specific lithographic projection apparatus includinga specific radiation source, one can identify data relating to iso-densebias which are characteristic for that process, when executed on thatlithographic system. In a situation where different lithographicprojection apparatus (of the same type and/or of different types) are tobe used for the same lithographic manufacturing process step, there is aproblem of mutually matching the corresponding different CD-pitchdependencies, such as to reduce CD variations occurring in themanufacturing process.

A known technique to match a CD-pitch dependency of a machine (for aprocess whereby an annular illumination mode is used) to a CD-pitchdependency of another machine is—in analogy with above describedtechniques to compensate an iso-dense bias—to change the σ-outer andσ-inner settings, while maintaining the difference between the σ-outerand σ-inner settings (i.e., whilst maintaining the annular ring width ofthe illumination mode) of one of the two machines. The nominalσ-settings are chosen so as to optimize the process latitude (inparticular, the depth of focus and the exposure latitude). Therefore,this approach has the disadvantage that for the machine whereby theσ-settings are changed, the process latitude is becoming smaller and maybecome too small for practical use.

An actual pitch dependency as described above may be varying in time.For example, due to lens heating the aberration of the projection systemmay vary, and or due to heating and other instabilities properties suchas illumination settings, and exposure dose of radiation energy may varyin time. Therefore there is the problem of controlling and keepingwithin tolerance a desired CD-pitch dependency.

SUMMARY OF THE INVENTION

The present inventors have identified the following. Techniques areknown to enhance the depth of focus for a projection lithographicprocess by manipulating the spectral distribution of radiant intensityof the projection beam. Generally, radiation used for exposure isprovided by an excimer laser; for example, a KrF excimer laser operatingat 248 nm wavelength or an ArF excimer laser operating at 193 nmwavelength may be used. The spectral distribution of radiant intensityprovided by such lasers comprises a spectral intensity peak having asymmetric shape with respect to a peak wavelength λ_(p). The bandwidthof the spectral peak may be expressed as a full-width half-maximumbandwidth (referred to as FWHM bandwidth) or alternatively as thebandwidth within which 95% of the total output power of the laser iscontained (referred to as the E95 bandwidth), with the peak wavelengthλ_(p) typically centered within said bandwidths.

The finite magnitude of the bandwidth introduces a “smear out” of theimage of a feature over a focus range around a best focus position BF.Said smear out is represented by a plurality of images displaced alongthe optical axis of the projection system, in accordance with aplurality of radiation wavelengths (in a range of wavelengths centeredat λ_(p)). The plurality of axially displaced images is formed by theprojection system due to the presence of residual axial chromaticaberration of the projection system. If F is the distance between theplane of best focus corresponding to the radiation wavelength λ_(p) andan image plane corresponding to the radiation wavelength λ, the effectof axial chromatic aberration is described by dF/dλ=AC, where AC is aconstant. Therefore, to a good approximation the effect of a constantdefocus of the substrate over a distance F, during exposure, is the sameas the effect of a change of wavelength Δλ given by Δλ=F/AC and exposingwith radiation of this changed wavelength with the substrate held in thebest-focus focal plane.

The effects of finite spectral bandwidth of the laser radiation can bemodeled by linearly converting a symmetric laser spectral distributionof exposure intensity into a symmetric focus distribution using the lensproperty AC defined by dF/dλ=AC. Over a fairly wide range of wavelengthsthe laser spectrum can be converted linearly into a focus spectrum usingthis lens dependency dF/dλ (see FIG. 1a U.S. Patent ApplicationPublication No. 2002/0048288 A1).

A finite laser bandwidth results in the re-distribution of the aerialimage through focus. The total aerial image will be a sum of the aerialimages, each aerial image defocused in accordance with F=AC Δλ, andweighted by the relative exposure intensity at the wavelengthλ=λ_(p)+Δλ.

This addition of (generally defocused) images has an effect on the imagecontrast at wafer level. Therefore, laser bandwidth contributes to theoptical proximity effects and the CD-pitch dependency of a system. Thelaser bandwidth can vary from system to system. As a result theproximity behavior and the CD-pitch dependency can differ from system tosystem resulting in a proximity-behavior mismatch between differentapparatus or between an actual and a target CD-pitch dependency.

It is an object of the present invention to obviate or mitigate one ormore of the aforementioned problems in the prior art. In particular, itis an object of the invention to provide improved control over aniso-dense bias, both in magnitude as well as over time.

According to an aspect of the invention there is provided a lithographicapparatus comprising:

-   -   a radiation system for providing a beam of electromagnetic        radiation having a spectral distribution of radiant intensity        I(λ), a support structure for supporting a patterning device,        the patterning device serving to impart the beam of radiation        with a pattern in its cross-section;    -   a substrate table for holding a substrate, a projection system        for projecting the beam of radiation after it has been patterned        onto a target portion of the substrate, and a controller        configured and arranged to provide an adjustment of said        spectral distribution of radiant intensity based on data        relating to a feature arranged at a first pitch and at a second        pitch in the pattern and representing a corresponding first        printed size and second printed size of the feature.

The present invention provides an advantage of adjustment of thespectral distribution of radiant intensity I(λ): using data relating toa feature-size with the feature arranged at two different pitches, suchas for example data describing the CD-pitch dependency, it is possibleto match system to system optical proximity behavior.

According to a further aspect of the invention, there is provided adevice manufacturing method including providing a beam ofelectromagnetic radiation having a spectral distribution of radiantenergy, patterning the beam of radiation with a pattern in itscross-section using a patterning device, projecting the patterned beamof radiation onto a target portion of a substrate, and adjusting of saidspectral distribution of radiant intensity in accordance with datarelating to a feature arranged at a first pitch and at a second pitch inthe pattern and representing a corresponding first printed size andsecond printed size of the feature.

Although specific reference may be made in this text to the use oflithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications, such as the manufacture of integrated opticalsystems, guidance and detection patterns for magnetic domain memories,liquid-crystal displays (LCDs), thin-film magnetic heads, etc. Theskilled artisan will appreciate that, in the context of such alternativeapplications, any use of the terms “wafer” or “die” herein may beconsidered as synonymous with the more general terms “substrate” or“target portion,” respectively. The substrate referred to herein may beprocessed, before or after exposure, in for example a track (a tool thattypically applies a layer of resist to a substrate and develops theexposed resist) or a metrology or inspection tool. Where applicable, thedisclosure herein may be applied to such and other substrate processingtools. Further, the substrate may be processed more than once, forexample in order to create a multi-layer IC, so that the term substrateused herein may also refer to a substrate that already contains multipleprocessed layers.

The terms “radiation” and “beam” used herein encompass all types ofelectromagnetic radiation, including ultraviolet (UV) radiation (e.g.,having a wavelength of 365, 248, 193, 157 or 126 nm) and extremeultra-violet (EUV) radiation (e.g., having a wavelength in the range of5-20 nm), as well as particle beams, such as ion beams or electronbeams.

The term “patterning device” used herein should be broadly interpretedas referring to devices that can be used to impart a projection beamwith a pattern in its cross-section such as to create a pattern in atarget portion of the substrate. It should be noted that the patternimparted to the projection beam may not exactly correspond to thedesired pattern in the target portion of the substrate. Generally, thepattern imparted to the projection beam will correspond to a particularfunctional layer in a device being created in the target portion, suchas an integrated circuit.

Patterning devices may be transmissive or reflective. Examples ofpatterning devices include masks, programmable mirror arrays, andprogrammable LCD panels. Masks are well known in lithography, andinclude mask types such as binary, alternating phase-shift, andattenuated phase-shift, as well as various hybrid mask types. An exampleof a programmable mirror array employs a matrix arrangement of smallmirrors, each of which can be individually tilted so as to reflect anincoming radiation beam in different directions; in this manner, thereflected beam is patterned. The support structure supports, i.e., bearsthe weight of, the patterning device. It holds the patterning device ina way depending on the orientation of the patterning device, the designof the lithographic apparatus, and other conditions, such as for examplewhether or not the patterning device is held in a vacuum environment.The support can be using mechanical clamping, vacuum, or other clampingtechniques, for example electrostatic clamping under vacuum conditions.The support structure may be a frame or a table, for example, which maybe fixed or movable as required and which may ensure that the patterningdevice is at a desired position, for example with respect to theprojection system. Any use of the terms “reticle” or “mask” herein maybe considered synonymous with the more general term “patterning device.”

The term “projection system” used herein should be broadly interpretedas encompassing various types of projection system, including refractiveoptical systems, reflective optical systems, and catadioptric opticalsystems, as appropriate for example for the exposure radiation beingused, or for other factors such as the use of an immersion fluid or theuse of a vacuum. Any use of the term “lens” herein may be considered assynonymous with the more general term “projection system.”

The lithographic apparatus may be of a type having two (dual stage) ormore substrate tables (and/or two or more mask tables). In such“multiple stage” machines the additional tables may be used in parallel,or preparatory steps may be carried out on one or more tables while oneor more other tables are being used for exposure.

The lithographic apparatus may also be of a type wherein the substrateis immersed in a liquid having a relatively high refractive index, e.g.,water, so as to fill a space between the final element of the projectionsystem and the substrate. Immersion techniques are well known in the artfor increasing the numerical aperture of projection systems.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings in whichcorresponding reference symbols indicate corresponding parts, and inwhich:

FIG. 1 depicts a lithographic apparatus according to an embodiment ofthe invention;

FIG. 2 depicts a lithographic apparatus according to a furtherembodiment of the invention;

FIG. 3( a) illustrates an example of an asymmetric spectral intensitydistribution with a location of a peak wavelength, a center wavelength,and E95 wavelengths;

FIG. 3( b) illustrates examples of symmetric spectral intensitydistributions;

FIG. 3( c) examples of asymmetric spectral intensity distributions;

FIG. 4 illustrates four CD-pitch curves for four different spectralbandwidths;

FIG. 5 illustrates a symmetric spectral intensity distribution as asuperposition of two spectrally overlapping intensity distributions andas a superposition of two mutually displaced spectral intensitydistributions;

FIG. 6 shows a schematic representation of Bossung curves for dense andisolated features;

FIG. 7 illustrates a symmetric spectral intensity distribution and aweight factor representing the intensity distribution;

FIG. 8 shows an example of Bossung curves for dense and isolatedfeatures, and the effect of an increase of spectral bandwidth;

FIG. 9 illustrates an asymmetric laser spectral intensity distributionand an representative weight function consisting of two adjacent blockshaped sections;

FIG. 10 shows an example of Bossung curves for dense and isolatedfeatures, and the effect of an increase of asymmetry of a spectralintensity distribution;

FIG. 11 illustrates four intensity distributions for use with asimulation of the effect of increased intensity distribution asymmetryat a constant FWHM (Full Width Half Maximum);

FIG. 12 shows the Bossung curves for dense and isolated featurescorresponding to the spectra of FIG. 11;

FIG. 13 depicts a simulated effect of increased asymmetry of thespectral intensity distribution at constant FWHM (Full Width HalfMaximum);

FIG. 14 schematically depicts the effect of a transition from arelatively narrow, symmetric spectral intensity distribution to abroader symmetric and to a broader asymmetric spectral intensitydistribution on a Bossung curve for an isolated feature, and

FIG. 15 depicts a flow diagram illustrating a device manufacturingmethod according to the invention.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 schematically depicts a lithographic apparatus according to aparticular embodiment of the invention. The apparatus comprises:

-   -   an illumination system (illuminator) IL for providing a        projection beam PB of radiation (e.g., UV radiation or EUV        radiation).    -   a first support structure (e.g., a mask table) MT for supporting        a patterning device (e.g., a mask) MA and connected to first        positioning actuator PM for accurately positioning the        patterning device with respect to item PL;    -   a substrate table (e.g., a wafer table) WT for holding a        substrate (e.g., a resist-coated wafer) W and connected to        second positioning actuator PW for accurately positioning the        substrate with respect to item PL; and    -   a projection system (e.g., a refractive projection lens) PL for        imaging a pattern imparted to the projection beam PB by        patterning device MA onto a target portion C (e.g., comprising        one or more dies) of the substrate W.

As here depicted, the apparatus is of a transmissive type (e.g.,employing a transmissive mask). Alternatively, the apparatus may be of areflective type (e.g., employing a programmable mirror array of a typeas referred to above).

The illuminator IL receives a beam of radiation from a radiation sourceSO. The source and the lithographic apparatus may be separate entities,for example when the source is an excimer laser. In such cases, thesource is not considered to form part of the lithographic apparatus andthe radiation beam is passed from the source SO to the illuminator ILwith the aid of a beam delivery system BD comprising for examplesuitable directing mirrors and/or a beam expander. In other cases thesource may be integral part of the apparatus, for example when thesource is a mercury lamp. The source SO and the illuminator IL, togetherwith the beam delivery system BD if required, may be referred to as aradiation system.

The illuminator IL may comprise adjustable optical elements AM foradjusting the angular intensity distribution of the beam. Generally, atleast the outer and/or inner radial extent (commonly referred to asσ-outer and σ-inner, respectively) of the intensity distribution in apupil plane of the illuminator can be adjusted. In addition, theilluminator IL generally comprises various other components, such as anintegrator IN and a condenser CO. The illuminator provides a conditionedbeam of radiation, referred to as the projection beam PB, having adesired uniformity and intensity distribution in its cross-section.

The projection beam PB is incident on the mask MA, which is held on themask table MT. Having traversed the mask MA, the projection beam PBpasses through the lens PL, which focuses the beam onto a target portionC of the substrate W. With the aid of the second positioning actuator PWand position sensor IF (e.g., an interferometric device), the substratetable WT can be moved accurately, e.g., so as to position differenttarget portions C in the path of the beam PB. Similarly, the firstpositioning actuator PM and another position sensor (which is notexplicitly depicted in FIG. 1) can be used to accurately position themask MA with respect to the path of the beam PB, e.g., after mechanicalretrieval from a mask library, or during a scan. In general, movement ofthe object tables MT and WT will be realized with the aid of along-stroke module (coarse positioning) and a short-stroke module (finepositioning), which form part of the positioning actuator PM and PW.However, in the case of a stepper (as opposed to a scanner) the masktable MT may be connected to a short stroke actuator only, or may befixed. Mask MA and substrate W may be aligned using mask alignment marksM1, M2 and substrate alignment marks P1, P2.

The depicted apparatus can be used in the following modes, for example:

In step mode, the mask table MT and the substrate table WT are keptessentially stationary, while an entire pattern imparted to theprojection beam is projected onto a target portion C at once (i.e., asingle static exposure). The substrate table WT is then shifted in the Xand/or Y direction so that a different target portion C can be exposed.In step mode, the maximum size of the exposure field limits the size ofthe target portion C imaged in a single static exposure.

In scan mode, the mask table MT and the substrate table WT are scannedsynchronously while a pattern imparted to the projection beam isprojected onto a target portion C (i.e., a single dynamic exposure). Thevelocity and direction of the substrate table WT relative to the masktable MT is determined by the (de-)magnification and image reversalcharacteristics of the projection system PL. In scan mode, the maximumsize of the exposure field limits the width (in the non-scanningdirection) of the target portion in a single dynamic exposure, whereasthe length of the scanning motion determines the height (in the scanningdirection) of the target portion.

In another mode, the mask table MT is kept essentially stationaryholding a programmable patterning device, and the substrate table WT ismoved or scanned while a pattern imparted to the projection beam isprojected onto a target portion C. In this mode, generally a pulsedradiation source is employed and the programmable patterning device isupdated as required after each movement of the substrate table WT or inbetween successive radiation pulses during a scan. This mode ofoperation can be readily applied to maskless lithography that utilizesprogrammable patterning devices, such as a programmable mirror array ofa type as referred to above.

Combinations and/or variations on the above described modes of use orentirely different modes of use may also be employed.

FIG. 2 schematically depicts a lithographic apparatus according to oneembodiment of the invention. The apparatus of FIG. 2, in contrast to theapparatus in FIG. 1, is of a reflective type (e.g., employing areflective mask).

The apparatus of FIG. 2 comprises:

-   -   an illumination system (illuminator) IL configured to condition        a radiation beam B (e.g., UV radiation or EUV radiation);    -   a support structure (e.g., a mask table) MT constructed to        support a patterning device (e.g., a mask) MA and connected to a        first positioner PM configured to accurately position the        patterning device in accordance with certain parameters;    -   a projection system (e.g., a refractive projection lens system)        PS configured to project a pattern imparted to the radiation        beam B by patterning device MA onto a target portion C (e.g.,        comprising one or more dies) of the substrate W.

A difference between the spectral bandwidth of lasers which are part ofrespective lithographic projection apparatus result in differencesbetween a pitch dependent variation of printed CD for these respectiveapparatus. Thus, a difference between the respective CD-pitchdependencies may occur. The present invention seeks to address thisproblem by providing an apparatus which is equipped with a controllerconfigured and arranged to provide an adjustment of the spectraldistribution of the laser radiation whereby the adjustment is aimed ataffecting the CD-pitch dependency of the lithographic apparatus. Theadjustment may be a dynamic adjustment to compensate for variations intime of an iso-dense bias. Such variations in time may, for example, becaused by lens heating due to absorption of laser beam radiation duringexposure. The CD-pitch dependency is specific for the apparatus incombination with the layout of the mask pattern and other processparameters and properties such as for example the illumination mode andsetting, the exposure time, the resist type, the specific lensaberrations, as well as settings for the pre-exposure and post exposureprocessing steps.

As explained above, a CD-pitch dependency can be affected, according tothe present invention, by adjusting the spectral intensity distributionof the laser beam. An excimer laser generally is provided with means tocontrol and adjust the spectral distribution of the emitted laserradiation. For example U.S. Patent Application Publication No.2002/0048288A1 relates to an excimer laser provided with a controller ofa line-narrowing device for controlling a the spectral distribution ofthe laser beam. The controller is arranged to adjust the bandwidth ofthe spectral distribution by dithering a wavelength tuning mirror inphase with the repetition rate of the laser. The line narrowing unitcomprises a grating and a fast tuning mechanism, and the controllercontrols a monitoring of the laser beam to determine bandwidth ofindividual pulses laser pulses, and a periodically adjusting of thetuning mechanism during a series of pulses so that the wavelengths ofsome pulses in the series of pulses are slightly longer than a targetwavelength and the wavelengths of some pulses in the series of pulsesare slightly shorter than the target wavelength in order to produce forthe series of pulses an effective laser beam spectrum having at leasttwo spectral peaks. In the latter case, the spectral distribution ofradiant intensity may for example be a superposition of a first and asecond peaked spectral intensity distribution having a respective equalfirst and second full-width half-maximum bandwidth, and a respectiveequal first and second intensity. The spectral peaks feature arespective first and second peak wavelength, and the difference Δλ_(p)between the first and second peak wavelength is adjustable.

Similarly, U.S. Pat. No. 5,303,002 relates to an excimer laser whichgenerates a beam of radiation whereby the spectral distribution ofradiant intensity of the laser beam of radiation comprises a pluralityof narrow spectral bands of radiation. A line narrowing device isarranged to select one or more line narrowed outputs to be used for thelithographic process. Each of the outputs may have an attenuator whichcan adjust the intensity of each spectral band independently. Thecorresponding radiation beams pass through a gain generator and arecombined to produce a beam of radiation with the desired spectraldistribution.

The modified spectral intensity distribution may be an asymmetricdistribution, i.e. a distribution with a spectral shape deviating from asymmetric shape with respect to a center wavelength λ_(c).

Referring to FIG. 3( a), there is shown an example of an asymmetricspectral distribution 300. The wavelengths λ₁ and λ₂ in FIG. 3( a)define the E95 bandwidth represented by the arrow 301. The wavelengthλ_(c) is the center wave length, i.e. the wavelength at the center ofthe range [λ₁, λ₂]. The curve 300 represents the spectral intensitydistribution I(λ), which is peaked at a peak wavelength λ_(p). Ingeneral, an asymmetric intensity distribution is characterized by theinequality I(λ−λ_(c))≠I(λ_(c)−λ). A measure for asymmetry may beexpressed in terms of the moments of intensity MI_(left) and MI_(right)defined as

$\begin{matrix}{{{MI}_{left} = {{\int_{\lambda_{1}}^{\lambda_{c}}{{\lambda \times {I(\lambda)}}{\mathbb{d}\lambda}\mspace{14mu}{and}\mspace{14mu}{MI}_{right}}} = {\int_{\lambda_{c}}^{\lambda_{2}}{{\lambda \times {I(\lambda)}}{\mathbb{d}\lambda}}}}},} & (1)\end{matrix}$and the spectrum may be referred to as asymmetric when MI_(left) isdifferent from MI_(right). For example, the spectrum may be referred toas asymmetric when the spectral intensity distribution I(λ) is anasymmetric distribution whereby the moments of intensity, as defined inequation (1), satisfy the inequality

${1.05 \leq \frac{{MI}_{left}}{{MI}_{right}}},{or}$$0.95 \geq {\frac{{MI}_{left}}{{MI}_{right}}.}$

FIG. 3( b) shows an example of symmetric spectral radiationdistributions 302,304 and 306.

FIG. 3( c) shows an example of asymmetric spectral radiationdistributions 303, 305 and 307.

FIG. 4 illustrates several CD-pitch curves obtained by simulation of alithographic process. Each of the simulated CD-against-pitch curvesrelates to a line feature occurring at different pitches. The line widthto be printed is 150 nm; the corresponding pitch of a 1:1 duty cycledense pattern of these lines is 300 nm. The spectral distribution oflaser radiation is symmetric, and the CD-pitch curves 402, 403, and 404are parameterized by the E95 bandwidth of the spectral peak. The plot401 represents the iso-dens bias characteristic for the ideal casewhereby the laser radiation is monochromatic. The CD-pitch curves 402,403, and 404 represent the CD versus pitch behaviour of the lithographicprocess for respectively an E95 bandwidth of 0.52 pm, 0.8 pm, and 1.2pm. Whereas at 300 nm pitch a variation of laser bandwidth haspractically no effect, the printed line width (CD) for lines arrangedat, for example 800 nm pitch is dependent on the laser bandwidth.

According to the present invention, the line biasing at the mask may forexample be chosen such as to compensate the variations of IDBcharacteristic 403. Lines at a pitch of 300 nm are line-biased with 17nm and lines arranged at 800 nm are line-biased 35 nm, in order toobtain equal printed line width of 150 nm (printed CD) for both pitches.

However, since line width variations can be caused by a multitude oferrors such as focus and dose variations, exposure tool imperfectionssuch as σ value variations, projection lens aberrations, or flare, aresidual iso-dense bias error may occur in spite of using abovedescribed feature biased mask pattern for exposure. This residualiso-dense bias may either be predicted using apparatus data and acomputer-simulation of the lithographic process, or, alternatively, maybe measured by running a calibration measurement. In both ways, datarelating to the line-feature arranged at a first pitch (for example, 300nm) and at a second pitch (for example, 800 nm) in the pattern andrepresenting the corresponding first printed line width and secondprinted line width of the line-feature can be obtained.

A deviation at 300 nm pitch of the printed line width may, for example,be compensated by adjusting the exposure dose. The data obtained may becorrected for this exposure dose adjustment. As a result, the expectedprinted CD at 800 nm pitch may then be 1.5 or 2 nanometer too small(when, for example, the apparatus and process in use is characterized byplot 404). From the behaviour of CD as a function of laser spectralbandwidth at 800 nm pitch, an adjustment of the spectral distribution ofradiant intensity based on the data (and corrected for exposure doseadjustment in this example) may be applied in accordance with thecharacteristics 404 and 403: a decrease of the bandwidth by 0.3 pm willlead to an increase of line width at 800 nm pitch by 1.5 to 2 nm,without affecting the line width at 300 nm pitch.

Alternatively, the expected printed line width at 800 nm pitch may be 2nanometer too big (for example, the apparatus and process in use ischaracterized by plot 302), in which case an adjustment of the spectraldistribution of radiant intensity based on the data (and corrected forexposure dose adjustment) may be applied in accordance with thecharacteristics 402 and 403: an increase of the bandwidth by 0.4 pm willlead to a decrease of line width at 800 nm pitch by about 2 nm, againwithout substantially affecting the line width at 300 nm pitch.According to the present invention, an adjustment of the laser spectralintensity distribution can be used as described above to provide anadjustment of a CD-pitch dependency. Such an adjustment can be used toreduce optical proximity effects or residual optical proximity effectsin a lithographic printing process, or to reduce differences betweendifferent CD-pitch dependencies of different apparatus.

According to an aspect of the invention, the adjustment described aboveis obtained using an excimer laser whereby the spectral distribution ofradiant intensity is a superposition of two equal but spectrallydisclaced, peaked spectral intensity distributions having an equal firstand second full-width half-maximum bandwidth, and a respective equalfirst and second intensity, and whereby the difference Δλ_(p) betweenthe first and second peak wavelength is adjustable in a range from 0 to0.5 pm and more particularly from 0 to 1 pm. With these ranges, and withtypical axial chromatic aberration (absolute) values for the coefficientAC, such as for example in a range from 150 nm/pm to 400 nm/pm, smearout of the image covers a range of about −400 to +400 nm around bestfocus which is a practical range for adjusting or matching an iso-densebias.

According to an aspect of the invention the source SO in FIG. 1 is anexcimer laser providing a pulsed beam of laser radiation. The lasercomprises bandwidth monitoring equipment and wavelength tuning equipmentpermitting bandwidth control of the laser beam by a bandwidth-controllerof the laser. The bandwidth-controller of the laser is generally used tomaintain a preselected bandwidth (compensating, for example, changes inthe laser-gain medium over the life of the laser), in accordance with aselection made by the laser manufacturer. According to the presentinvention, however, the bandwidth-controller of the laser is providedwith an input channel arranged for receiving a signal representative fora selected bandwidth of the spectral distribution in accordance with aselection made by the user of the laser. For example, the signal can beprovided by the controller of the lithographic apparatus according tothe present invention. With an eximer laser featuring a user-selectablespectral bandwidth the adjustment of iso-dense bias according to thepresent invention can be provided dynamically, for example, during asanning exposure of a target portion C or during a plurality ofexposures of target portions C covering a substrate. Both intra-die andinter die control of iso-dense bias is obtained this way. Similarly, aneximer laser provided with user-selectable spectral bandwidth settingcan be used to obtain iso-dense bias matching between differentapparatus, in accordance with the present invention.

FIG. 5 illustrates a spectral distribution of radiant intensity 500 as asuperposition of a first peaked spectral intensity distribution 501 anda second peaked spectral intensity distribution 502 having a respectiveequal first bandwidth 503 and second bandwidth 504. The respective firstand second peak intensities as well as the first and second peakwavelengths λ_(p1) and λ_(p2) are equal. FIG. 5 further illustrates theeffect of providing, through control of the line width narrowing deviceof the pulsed excimer laser, an adjustment comprising a change Δλ_(p) ofthe difference between the first and second peak wavelength. Theadjustment is (the difference λ₁−λ_(p2) in FIG. 5 being initially zero)in the present example equal to the difference λ_(p2)−λ_(p1). Theresulting intensity distribution 506 has a bandwidth 507 larger than theinitial bandwidth 505.

Referring to FIG. 6 there is shown a schematic representation of aBossung curve 600 typical for an isolated feature and a Bossung curve601 typical for the feature in dense arrangement, i.e., arranged at aduty cycle 1:1. The Bossung curve 600 represents a plot of printedcritical dimension for the feature in isolated arrangement, and thecorresponding CD is denoted by CD_(iso), as it would be obtained withexposure in different focal positions. The exposure energy is a constantalong the plots 600 and 601. The different focal positions are given bythe focal coordinate F (above referred to as a “defocus”), which definesthe position of the substrate with respect to a position of best focusBF.

Typically, the printed critical dimension CD_(dense) of the densefeature does not depend (to a first approximation) on focal position,because of the extended depth of focus resulting from two beam imaging.Generally, imaging of dense features is arranged such that only twodiffracted orders of radiation, as emerging from the pattern, arecaptured by the imaging projection lens.

The printed critical dimension CD_(iso) may be modelled as a polynomialof F according toCD _(iso) =A ₀ +A ₁ F+A ₂ F ² +A ₄ F ⁴,  (2)

whereby the coefficient A₀ represents the printed CD at best focus.Further, the coordinate F may be expressed in terms of an absolute focuscoordinate f defined by

F=f−f_(BF), where the coordinate f_(BF) is the absolute coordinate,along the z-axis, of the best focus position BF.

In the absence of a so-called linear focus term, i.e. when A₁=0, theresulting second order approximation denoted by CD_(iso) (0,2; f) ofCD_(iso) is then given byCD _(iso)(0,2;f)=A ₀ +A ₂(f−f _(BF))².  (3)

In contrast, the Bossung curve for the dense feature may simply bemodeled as CD_(dense)=B₀. Thus, at best focus BF, the dense features areprinted at a width B₀, and the isolated features at a width A₀, and theiso-dense bias between the features would be A₀−B₀ nm.

In accordance with the present invention, the effects of finite spectralbandwidth on the Bossung curve can be modeled by linearly converting asymmetric spectral intensity distribution of the laser beam into asymmetric focus distribution using the lens property AC defined bydF/dλ=AC. Since F=f−f_(BF), also df/dλ=AC at or near best focusposition. The laser bandwidth results in the re-distribution of theaerial image through focus. The total aerial image will be a sum of theaerial images, each aerial image defocused in accordance with F=AC Δλ,and weighted by the relative exposure intensity at each wavelength λ.The weighting may be expressed by a weight-function W in accordance withthe spectral distribution of radiant intensity I(λ) of the laserradiation.

The resulting printed CD incorporating the effect of the addition of the(generally defocused) images may be represented by CD_(av), and can beapproximated by the following averaging:

$\begin{matrix}{{{{CD}_{av}(f)} = \frac{\int_{f - {\frac{1}{2}F_{BW}}}^{f + {\frac{1}{2}F_{BW}}}{{{CD}_{iso}( f^{\prime} )}{W( {f^{\prime} - f} )}{\mathbb{d}f^{\prime}}}}{\int_{f - {\frac{1}{2}F_{BW}}}^{f + {\frac{1}{2}F_{BW}}}{{W( {f^{\prime} - f} )}{\mathbb{d}f^{\prime}}}}},} & (4)\end{matrix}$

where the “bandwidth” F_(BW) represents the focus range equivalent tothe bandwidth of the spectral intensity distribution. For example, withλ₁ and λ₂ being the E95 bandwidth wavelengths, F_(BW) can be defined asF_(BW)=AC (λ₁−λ₂). The weight function W(f) is proportional to thespectral distribution of radiant intensity I(λ) and can be obtained fromI(λ) by expressing I(λ) as a function of (λ−λ_(c)), and writing λ−λ_(c)as an equivalent focal coordinate f with (λ−λ_(c))=f/AC, in view of thelens property df/dλ=AC.

For simplicity it will be assumed that the weight function W(f) inaccordance with the symmetric intensity distribution 302 of FIG. 3 canbe approached by a block function 700, as illustrated in FIG. 7.

Combination of this approximation with the approximation CD_(iso) (0,2;f) for the printed CD of an isolated feature, results in the followingprediction for the average CD (at best focus) of a feature due to theintroduction of a finite laser bandwidth (resulting in there-distribution of the aerial image over a focus range of from −½F_(BW)to ½F_(BW)):

$\begin{matrix}{{{CD}_{av}( f_{BF} )} = {\frac{\int_{f_{BF} - {\frac{1}{2}F_{BW}}}^{f_{BF} + {\frac{1}{2}F_{BW}}}{{{CD}_{iso}( {0,{2;f^{\prime}}} )}{\mathbb{d}f^{\prime}}}}{\int_{f_{BF} - {\frac{1}{2}F_{BW}}}^{f_{BF} + {\frac{1}{2}F_{BW}}}{\mathbb{d}f^{\prime}}}\mspace{121mu} = {A_{0} + {\frac{1}{12}A_{2}F_{BW}^{2}}}}} & (5)\end{matrix}$

From the above equation it is clear that the change ΔCD_(iso) in printedcritical dimension at best focus (due to a change from idealmonochromatic radiation to the introduction of a certain laser bandwidthresulting in a through focus re-distribution of the image over a focusrange from −½F_(BW) to ½F_(BW)) is given by

${\Delta\;{CD}_{iso}} = {{A_{2} \cdot \frac{1}{12}}{ F_{BW}^{2} \sim F_{BW}^{2}}}$

In contrast, no such change occurs for the size of the dense features,since in the present approximation CD_(dense) is a constant value,independent of focus position: CD_(dense)=B₀, in accordance with theiso-dense characteristics as illustrated in FIG. 4.

FIG. 8 schematically illustrates the effect of the change from an idealpractically monochromatic radiation spectrum of the laser beam to theintroduction of a finite laser bandwidth in accordance with the presentapproximation. The arrow 800 represents the (focus independent) shiftΔCD_(iso) of the Bossung curve 600 representing the printed CD asobtained with the exposure process using a practically monochromatic(not bandwidth broadened) laser radiation spectrum, and the curve 810 isthe Bossung curve for the increased laser bandwidth. Since generally theBossung curve for the feature in dense arrangement is less or notsensitive to a change of spectral bandwidth, the adjustment of spectralbandwidth can be used for adjusting the CD-pitch dependency.

Assuming that the energy dependence of the CD is focus independent anundesired residual impact of laser bandwidth on printed CD could beeasily compensated in order to maintain the CD of a reference feature(such as for example the dense lines in the present embodiment)unaltered.

The same approximation as described above can be generalized for anarbitrary defocus position F (and using F=f−f_(BF)) as follows:

$\begin{matrix}{{{{{CD}_{av}(F)} = \frac{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF} + {\frac{1}{2}F_{BW}}}{{{CD}_{iso}( {0,{2;f^{\prime}}} )}{\mathbb{d}f^{\prime}}}}{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF} + {\frac{1}{2}F_{BW}}}{\mathbb{d}f^{\prime}}}},\mspace{95mu}{= {A_{0} + {A_{2}F^{2}} + {\frac{1}{12}A_{2}F_{BW}^{2}}}}}\mspace{14mu}} & (6)\end{matrix}$

The change in CD induced by the re-distribution of the aerial image overa focus range from −½F_(BW) to ½F_(BW) is independent of the focusposition F and is proportional with F_(BW) ².

For the fourth order focus term in Equation (2) can be derived thefollowing contribution CDav(4) to CDav:

$\begin{matrix}{{{CD}_{av}( {4,F} )} = {{\frac{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF} + {\frac{1}{2}F_{BW}}}{{A_{4}( {f^{\prime} - f_{BF}} )}^{4}{\mathbb{d}f^{\prime}}}}{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF} + {\frac{1}{2}F_{BW}}}{\mathbb{d}f^{\prime}}}.}\mspace{124mu} = {A_{4}( {F^{4} + {\frac{1}{2}F^{2}F_{BW}^{2}} + {\frac{1}{80}F_{BW}^{4}}} )}}} & (7)\end{matrix}$

Equation 7 shows that there is now a defocus-dependent shift as well asa constant shift of the Bossung curve.

Similarly, for a first order focus term in Equation (2) can be derivedthe contribution CDav(1) to CDav:

$\begin{matrix}{{{CD}_{av}( {1,F} )} = {\frac{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF} + {\frac{1}{2}F_{BW}}}{{A_{1}( {f^{\prime} - f_{BF}} )}{\mathbb{d}f^{\prime}}}}{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF} + {\frac{1}{2}F_{BW}}}{\mathbb{d}f^{\prime}}}\mspace{121mu} = {A_{1}F}}} & (8)\end{matrix}$

So the re-distribution of the aerial image over a focus range from−½F_(BW) to ½F_(BW) does not impact the linear focus term.

According to an embodiment of the invention, the spectral distributionof radiant intensity comprises a spectral intensity peak having, withrespect to a center wavelength, a symmetric shape and wherein saidadjustment comprises a change of the symmetric shape into an asymmetricshape with respect to the center wavelength.

An asymmetric spectral distribution of radiant intensity of the laserbeam can be provided, for example, by differently attenuating each of aplurality of narrow spectral bands of radiation in a line narrowingdevice which is arranged to select a plurality of line narrowed outputsto be used for the lithographic process. In FIG. 9 a asymmetricintensity distribution I(λ) is represented by the plot 300. Similar tothe embodiment described above, the intensity distribution may beapproximated by adjacent, block shaped intensity distributions. Inparticular, as is illustrated in FIG. 9, in the present embodiment theintensity distribution is modelled as two adjacent block functions 910and 920, of equal area, and different width. The E95 wavelengths λ₁ andλ₂ define a total bandwidth equivalent to the focus range 901 with amagnitude denoted by

${\frac{3}{2}F_{BW}},$and the spectrum is approximated by the left block function 910 of width

$\frac{1}{2}F_{BW}$and the right block function 920 of bandwidth F_(BW). As described abovefor a symmetric intensity distribution, the present asymmetric spectralradiant intensity distribution may be converted into a weight functionW(f) proportional to the spectral distribution of radiant intensity I(λ)by expressing I(λ), or in this embodiment by expressing the blockfunctions representing I(λ)) as a function of (λ−λ_(c)), and writingλ−λ_(c) as an equivalent focal coordinate f with (λ−λ_(c))=f/AC, in viewof the lens property df/dλ=AC. Since the block functions 910 and 920 areof equal area, the exposure dose in the corresponding focus ranges isequal.

The effect of a change of the spectral intensity distribution whichinitially is representing a quasi monochromatic laser line into anasymmetric spectral intensity distribution on a Bossung curve can beestimated using the procedure as described above.

A combination of the present approximation for the intensitydistribution I(λ) (resulting in to adjacent block-shaped weightfunctions) with the approximation CD_(iso) (0,2; f) for the printed CDof an isolated feature, results in the following prediction for theaverage critical dimension CD_(av) (at arbitrary defocus F):

$\begin{matrix}{{{CD}_{av}(F)} = {{\frac{1}{2}\frac{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF}}{{{CD}_{iso}( {0,{2;f^{\prime}}} )}{\mathbb{d}f^{\prime}}}}{\int_{F + f_{BF} - {\frac{1}{2}F_{BW}}}^{F + f_{BF}}{\mathbb{d}f^{\prime}}}} +}} \\{\frac{1}{2}\frac{\int_{F + f_{BF}}^{F + f_{BF} + F_{BW}}{{{CD}_{iso}( {0,{2;f^{\prime}}} )}{\mathbb{d}f^{\prime}}}}{\int_{F + f_{BF}}^{F + f_{BF} + F_{BW}}{\mathbb{d}f^{\prime}}}} \\{= {{A_{2}F^{2}} + {\frac{1}{2}A_{2}F\; F_{BW}} + {\frac{1}{4}A_{2}F_{BW}^{2}}}}\end{matrix}\quad$

As schematically indicated in FIG. 10, not only an offset 900 withmagnitude

$\frac{1}{4}A_{2}F_{BW}^{2}$is introduced (similar to the situation whereby an increase of bandwidthof a symmetric spectral distribution is applied) but also a linear term

$\frac{1}{2}A_{2}F\; F_{BW}$is introduced. The presence of these two contributions results in ashifted and tilted Bossung curve (910), as schematically indicated inFIG. 10. Further, the focus position along the optical axis where achange of critical dimension as a function of a change of focal positionis zero, is now located at a defocus position F_(iso) slightly defocusedfrom the best focus position f_(BF).

Since the Bossung curve for the feature in dense arrangement again isnot changing (in the present approximation), a transition from a narrowsymmetric intensity distribution to an asymmetric intensity distributioncould be used to adjust a CD-pitch dependency.

The impact of varying the asymmetry of a spectral intensity distributionI(λ) is shown by way of simulations and illustrated in FIG. 11 and FIG.12. FIG. 11 shows different asymmetric spectral intensity distributions111, 112, 113, and 114. For the simulations these spectral intensitydistributions were approximated. FIG. 12 shows the simulated effect ofincreased spectral asymmetry for constant FWHM (Full Width HalfMaximum=0.2 pm), and for nominal 65 nm dense and isolated lines (Prolith5 pass calculation, NA 0.93 and sigma 0.94/0.74, binary reticle,calibrated resist model). The Bossung curves 111′, 112′, 113′, and 114′correspond to the respective spectra 111, 112, 113, and 114. As expectedfrom the calculations, the effect is a shift of the Bossung curve alongthe focus-axis and change of the tilt of the Bossung curve at a fixedfocus. Note that all calculations were performed using the same exposuredose. Further, FIG. 12 shows that the Bossung curve 115 for dense linesis not affected by the spectral adjustment. Therefore, the adjustmentcan successfully be used for adjusting a CD-pitch dependency.

FIG. 13 shows simulated effect of increased asymmetry of the laserspectral intensity distribution for constant FWHM=0.2 pm, as shown inFIG. 11, on an iso-dense bias value for nominal 65 nm dense and isolatedlines. Showing the impact on iso dense bias when correcting for thefocus offset introduced by the asymmetry of the spectral distribution.The magnitude of the impact is application dependent (feature size andshape, resist and illumination conditions/mode).

Referring to FIG. 14, examples of Bossung curves 140, 141, 142 show theimpact of a transition from a conventional relatively narrow andsymmetrical spectral intensity distribution (143) to a symmetricalbandwidth-broadened distribution (144) and to an asymmetrical spectralintensity distribution (145). The dashed lines indicate theapproximation used for the weight function W(f). The Bossung curve fordense lines is not shown, and is unaffected, thereby providing twoindependent parameters for adjusting an iso dense bias characteristic ofan apparatus. Note for both the symmetrical and asymmetrical case thetotal focal range 146 is the same.

According to an aspect of the present invention a device manufacturingmethod may exploit the possibility to adjust an iso dense characteristicby adjustment of the spectral intensity distribution of the projectionbeam radiation, as provided by, for example, an excimer laser, in orderto keep the CD-pitch dependency within tolerance or to maintain amatching of the CD-pitch dependency to a target CD-pitch dependency. Asillustrated in FIG. 15, a first step 150 of the method comprisesobtaining iso-dense bias data the apparatus and the process run on theapparatus, i.e., data relating to a feature arranged at a first pitchand at a second pitch in the pattern and representing a correspondingfirst printed size and second printed size of the feature. Next,comparing these data with target data, step 151 in FIG. 15, yieldsinformation on the desired change of the iso-dense bias. Next, a firstadjustment of the iso-dense bias is provided by adjusting a lithographicapparatus setting (such as for example an exposure dose, a sigmasetting, and a setting of illumination mode parameters) such that forone pitch the features will be printed at the desired criticaldimension. This first adjustment is depicted by step 152. An independentsecond adjustment of the iso-dense bias is next obtained by adjustingthe spectral intensity distribution of the projection beam radiation,step 153. The latter step can be exploited to establish the printing ofthe desired critical dimension for features arranged at the secondpitch. Before printing the pattern (step 154), if the obtained, adjustediso-dense bias is not yet satisfactory, the steps 152 and 153 can berepeated until the adjusted iso-dense bias is sufficiently close to thetarget iso-dense bias.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. The description is not intended to limit theinvention. It will also be appreciated that the disclosed embodimentsmay include any of the features herein claimed.

1. A lithographic apparatus comprising: a support structure configuredto support a patterning device, the patterning device serving to imparta beam of electro-magnetic radiation having a spectral distribution ofradiant intensity, with a pattern in its cross-section; a substratetable configured to hold a substrate; a projection system configured toproject the beam of radiation after it has been patterned onto aradiation-sensitive target portion of the substrate; and a controllerconfigured and arranged to provide an adjustment of said spectraldistribution of radiant intensity based on data relating to a featurearranged at a first pitch and at a second pitch in the pattern andrepresenting a corresponding first printed size and second printed sizeof the feature.
 2. A lithographic apparatus according to claim 1,wherein the spectral distribution of radiant intensity comprises aspectral intensity peak having a bandwidth and wherein said adjustmentcomprises a change of the bandwidth.
 3. A lithographic apparatusaccording to claim 2, wherein the spectral distribution of radiantintensity is a superposition of a first and a second peaked spectralintensity distribution having a respective equal first and secondbandwidth, and a respective equal first and second intensity, and arespective first and second peak wavelength, and wherein the adjustmentcomprises a change of difference between the first and second peakwavelength.
 4. A lithographic apparatus according to claim 2, comprisingan excimer laser to provide the beam of radiation and having abandwidth-controller arranged to control a bandwidth of the spectraldistribution of radiant intensity, the bandwidth-controller constructedand arranged to adjust the bandwidth in reaction to a user suppliedsignal representative for a selected bandwidth of the spectraldistribution.
 5. A lithographic apparatus according to claim 4, whereinthe signal representative for a selected bandwidth of the spectraldistribution is provided by the controller.
 6. A lithographic apparatusaccording to claim 1, wherein the spectral distribution of radiantintensity comprises a spectral intensity peak having, with respect to acenter wavelength, a symmetric shape and wherein said adjustmentcomprises a change of the symmetric shape into an asymmetric shape withrespect to the center wavelength.
 7. A lithographic according to any ofthe claim 1, 2, or 6, wherein the radiation controller controls a sourceof the beam of radiation.
 8. A lithographic apparatus according to claim1, wherein the data represent a difference between the correspondingfirst printed size and second printed size of the feature.
 9. Alithographic apparatus according to claim 8, wherein the data furthercomprise a target difference between the corresponding first printedsize and second printed size of the feature.
 10. A lithographicapparatus according to claim 9, wherein the adjustment of said spectraldistribution of radiant intensity is arranged to match the difference tothe target difference.
 11. A lithographic apparatus according to claim10, wherein the target difference is a difference between thecorresponding first printed size and second printed size of the feature,as printed using the patterning device on a supplementary lithographicapparatus.
 12. A lithographic apparatus according to claim 1, whereinthe spectral distribution of radiant intensity is a superposition of afirst and a second peaked spectral intensity distribution having arespective first and second bandwidth, first and second peak wavelength,and first and second intensity, and wherein said adjustment comprises achange of one of difference between the first and second peak wavelengthand difference between the first and second bandwidth, differencebetween the first and second peak wavelength and difference between thefirst and second intensity, or difference between the first and secondpeak wavelength and difference between the first and second bandwidthand difference between the first and second intensity.
 13. Alithographic apparatus according to claim 12, wherein the differencebetween the first and second peak wavelength is selected from the groupconsisting of between 0 and 1 pm, and between 0 and 0.5 pm.
 14. A devicemanufacturing method comprising: providing a beam of electro-magneticradiation having a spectral distribution of radiant intensity;patterning the beam of radiation with a pattern in its cross-sectionusing a patterning device; projecting the patterned beam of radiationonto a radiation-sensitive target portion of a substrate; and adjustingof said spectral distribution of radiant intensity in accordance withdata relating to a feature arranged at a first pitch and at a secondpitch in the pattern and representing a corresponding first printed sizeand second printed size of the feature.
 15. A method according to claim14, wherein the spectral distribution of radiant intensity comprises aspectral intensity peak having a bandwidth and wherein said adjustingcomprises changing the bandwidth.
 16. A method according to claim 14,wherein the data represent a difference between the corresponding firstprinted size and second printed size of the feature.
 17. A methodaccording to claim 16, wherein the data further comprise a targetdifference between the corresponding first printed size and secondprinted size of the feature.
 18. A method according to claim 17, whereinthe adjusting of said spectral distribution of radiant intensitycomprises matching the difference to the target difference.
 19. A methodaccording to claim 18, wherein the target difference is a differencebetween the corresponding first printed size and second printed size ofthe feature, as printed using the patterning device on respectively afirst lithographic apparatus and a second lithographic apparatus.
 20. Amethod according to claim 14, wherein the spectral distribution ofradiant intensity comprises a spectral intensity peak shapedsymmetrically with respect to a center wavelength and wherein saidadjusting comprises changing the spectral intensity peak into a spectralintensity peak shaped asymmetrically with respect to the centerwavelength.
 21. A method according to claim 14, wherein the adjusting isprovided during one of a scanning exposure of a target portion on asubstrate or a plurality of scanning exposures of a correspondingplurality of target portions on a substrate.
 22. A lithographicapparatus comprising: a support structure configured to support apatterning device, the patterning device configured to impart with apattern a cross-section of a beam of electro-magnetic radiation; asubstrate table configured to hold a substrate; a projection systemconfigured to project the beam of radiation onto a radiation-sensitivetarget portion of the substrate; and a controller configured to providethe beam with a spectral distribution of radiant intensity having anasymmetric shape with respect to a center wavelength based on datarelating to a feature arranged at a first pitch and at a second pitch inthe pattern and representing a corresponding first printed size andsecond printed size of the feature.